# Version: 1.0
# Comment: ParamModi Export FRS TA1-ESR
# Context: SIS18_FAST_FRS-ESR_2019032.C1
# Comment: frs-esr-ta1-mut-2019-1 by Helmut Weick
# Columns: PARAMETERNAME,VALUE,UNIT,BEAMPROCESSPURPOSE
GTS2QT11/KL,2.770302946E-01,1/m,TRANSFER_EXTRACTION
GTS2QT12/KL,-6.168783791E-01,1/m,TRANSFER_EXTRACTION
GTS2QT13/KL,3.512170373E-01,1/m,TRANSFER_EXTRACTION
GTS2KS1/KL,0.000000000E+00,1/m²,TRANSFER_EXTRACTION
GTS3KS1/KL,0.000000000E+00,1/m²,TRANSFER_EXTRACTION
GTS3QD11/KL,3.736004659E-01,1/m,TRANSFER_EXTRACTION
GTS3QD12/KL,-2.050411489E-01,1/m,TRANSFER_EXTRACTION
GTS3QD21/KL,-3.172474075E-01,1/m,TRANSFER_EXTRACTION
GTS3QD22/KL,4.041073868E-01,1/m,TRANSFER_EXTRACTION
GTS3KS2/KL,0.000000000E+00,1/m²,TRANSFER_EXTRACTION
GTS3KS3/KL,0.000000000E+00,1/m²,TRANSFER_EXTRACTION
GTS3QT31/KL,3.354621887E-01,1/m,TRANSFER_EXTRACTION
GTS3QT32/KL,-6.271400740E-01,1/m,TRANSFER_EXTRACTION
GTS3QT33/KL,3.603395561E-01,1/m,TRANSFER_EXTRACTION
GTS4QT11/KL,3.162035110E-01,1/m,TRANSFER_EXTRACTION
GTS4QT12/KL,-6.400720780E-01,1/m,TRANSFER_EXTRACTION
GTS4QT13/KL,3.595844277E-01,1/m,TRANSFER_EXTRACTION
GTS4KS1/KL,0.000000000E+00,1/m²,TRANSFER_EXTRACTION
GTS4KS2/KL,0.000000000E+00,1/m²,TRANSFER_EXTRACTION
GTS4QD21/KL,2.535495336E-01,1/m,TRANSFER_EXTRACTION
GTS4QD22/KL,-3.391697280E-01,1/m,TRANSFER_EXTRACTION
GTS4QD31/KL,-0.000000000E+00,1/m,TRANSFER_EXTRACTION
GTS4QD32/KL,1.665327083E-01,1/m,TRANSFER_EXTRACTION
GTS4KS3/KL,0.000000000E+00,1/m²,TRANSFER_EXTRACTION
GTS5QT11/KL,2.186705572E-01,1/m,TRANSFER_EXTRACTION
GTS5QT12/KL,-5.900928224E-01,1/m,TRANSFER_EXTRACTION
GTS5QT13/KL,3.824723315E-01,1/m,TRANSFER_EXTRACTION
GTS5KS1/KL,0.000000000E+00,1/m²,TRANSFER_EXTRACTION
GTE5KS1/KL,0.000000000E+00,1/m²,TRANSFER_EXTRACTION
GTE5QD11/KL,1.347894899E-01,1/m,TRANSFER_EXTRACTION
GTE5QD12/KL,-3.326107374E-01,1/m,TRANSFER_EXTRACTION
GTE5QD21/KL,-0.000000000E+00,1/m,TRANSFER_EXTRACTION
GTE5QD22/KL,3.558381410E-01,1/m,TRANSFER_EXTRACTION