# Version: 1.0
# Comment: ParamModi Export FRS TA2-HTC, sext ok
# Context: SIS18_TS_HTC.C1
# Comment: frstor3b-ta2-largerspot by H. Weick, Yao Nan
# Columns: PARAMETERNAME,VALUE,UNIT,BEAMPROCESSPURPOSE
GTS2QT11/KL,5.226102304E-01,1/m,TRANSFER_EXTRACTION
GTS2QT12/KL,-7.634559420E-01,1/m,TRANSFER_EXTRACTION
GTS2QT13/KL,3.856712876E-01,1/m,TRANSFER_EXTRACTION
GTS2KS1/KL,7.356732498E-02,1/m²,TRANSFER_EXTRACTION
GTS3KS1/KL,-4.411366680E-02,1/m²,TRANSFER_EXTRACTION
GTS3QD11/KL,3.763735553E-01,1/m,TRANSFER_EXTRACTION
GTS3QD12/KL,-2.353486125E-01,1/m,TRANSFER_EXTRACTION
GTS3QD21/KL,-2.827109171E-01,1/m,TRANSFER_EXTRACTION
GTS3QD22/KL,3.880730541E-01,1/m,TRANSFER_EXTRACTION
GTS3KS2/KL,2.039244114E-01,1/m²,TRANSFER_EXTRACTION
GTS3KS3/KL,-1.716021663E-01,1/m²,TRANSFER_EXTRACTION
GTS3QT31/KL,3.602584300E-01,1/m,TRANSFER_EXTRACTION
GTS3QT32/KL,-6.765727747E-01,1/m,TRANSFER_EXTRACTION
GTS3QT33/KL,3.749768057E-01,1/m,TRANSFER_EXTRACTION
GTS4QT11/KL,2.065512715E-01,1/m,TRANSFER_EXTRACTION
GTS4QT12/KL,-6.049300201E-01,1/m,TRANSFER_EXTRACTION
GTS4QT13/KL,3.636911141E-01,1/m,TRANSFER_EXTRACTION
GTS4KS1/KL,-8.006725172E-02,1/m²,TRANSFER_EXTRACTION
GTS4KS2/KL,1.067028338E-01,1/m²,TRANSFER_EXTRACTION
GTS4QD21/KL,5.506959676E-02,1/m,TRANSFER_EXTRACTION
GTS4QD22/KL,0.000000000E+00,1/m,TRANSFER_EXTRACTION
GTS4QD31/KL,-3.635608661E-01,1/m,TRANSFER_EXTRACTION
GTS4QD32/KL,2.616909517E-01,1/m,TRANSFER_EXTRACTION
GTS4KS3/KL,0.000000000E+00,1/m²,TRANSFER_EXTRACTION
GTS5QT11/KL,0.000000000E+00,1/m,TRANSFER_EXTRACTION
GTS5QT12/KL,-3.232881646E-01,1/m,TRANSFER_EXTRACTION
GTS5QT13/KL,2.533939150E-01,1/m,TRANSFER_EXTRACTION
GTS5KS1/KL,0.000000000E+00,1/m²,TRANSFER_EXTRACTION
GTS7QD11/KL,2.640166820E-01,1/m,TRANSFER_EXTRACTION
GTS7QD12/KL,-2.482258567E-01,1/m,TRANSFER_EXTRACTION
GTS7KS1/KL,-5.518831666E-041/m²,TRANSFER_EXTRACTION
GTH4KS1/KL,7.214787107E-021/m²,TRANSFER_EXTRACTION
GTH4QD11/KL,2.539422375E-01,1/m,TRANSFER_EXTRACTION
GTH4QD12/KL,-1.611320654E-01,1/m,TRANSFER_EXTRACTION
GTH4QD21/KL,-2.557523339E-01,1/m,TRANSFER_EXTRACTION
GTH4QD22/KL,3.962314910E-01,1/m,TRANSFER_EXTRACTION
GTH4QD31/KL,3.646499505E-01,1/m,TRANSFER_EXTRACTION
GTH4QD32/KL,-3.136409982E-01,1/m,TRANSFER_EXTRACTION
GHTCQD11/KL,2.799230461E-01,1/m,TRANSFER_EXTRACTION
GHTCQD12/KL,-1.769655379E-01,1/m,TRANSFER_EXTRACTION
GHTCQT21/KL,0.414668844195182,1/m,TRANSFER_EXTRACTION
GHTCQT22/KL,-0.576668202363214,1/m,TRANSFER_EXTRACTION
GHTCQT23/KL,0.378871378851099,1/m,TRANSFER_EXTRACTION